CMOS Compatible Single-Gate Single Electron Transistor (SG-SET) Based Hybrid SETMOS Logic

The continuous development of CMOS technology today beyond many obstacles has been witnessed by all of us. After three decades of aggressive scaling to ever-smaller dimensions, today, MOSFET gate lengths can be less than 22 nm. There are many challenges and limitations at the device level. Short channel effects, such as drain induced barrier lowering, Vth roll-off, gate induced drain leakage, static leakage, punch through, and contact resistance, are among the major blockades for sub-22 nm technology. Many physicists have explored this extremely small dimension device and the effects of charge and energy quantization, and that emerged the concept of single electron conduction. Single-electron devices were being seen as one of the finest beyond-CMOS nanodevices reported by many researchers and ITRS. These devices were facing many roadblocks due to their ultra-small dimensions, fabrication viabilities, room temperature operation, CMOS compatible processes, and lack of simulation methodology. Since the last decade, the evolution of advanced e-beam lithography, Chemical-Mechanical polishing and deposition techniques has gained many researchers’ attention, and the trend to explore these devices is going continuously in an upward direction. Though it is difficult to replace CMOS technology completely, the hybridization of these devices with CMOS is one of the major interests shown by many research works.