Structural Properties of InAs/AlSb Superlattices

ABSTRACTShort-period (InAs)6/(AlSb)6 superlattices (SL) with AlAs-like and InSb-like interfaces (IF) grown on a relaxed AlSb buffer layer are studied by X-ray reflectivity and diffractometry measurements. Reflectivity measurements reveal average IF roughnesses between 0.6 and 1.0 nm. Measurements of the diffuse scattering show that the roughness is highly correlated from layer to layer. Triple crystal area scans illustrate that the inhomogeneous deformation of the buffer layer leads to a certain symmetric peak broadening. In the case of AlAs-like IFs an additional broadening of the SL peaks reveals lattice parameter gradients over the superlattice. This asymmetric peak broadening may be attributed to a further relaxation of the superlattice, which is inhomogeneous with depth. The diffusion of As into the AlSb layers leads to a peak shift and modifies the intensity ratios of the different satellite reflections. The best structural quality is achieved for superlattices with InSb-like IFs.