Search engine for discovering works of Art, research articles, and books related to Art and Culture
Javascript must be enabled to continue!
Epitaxial Growth of Si1-yCy Film by Low Temperature Chemical Vapor Deposition
View through CrossRef
Epitaxial Si1-y
Cy films were grown on Si(100) by two methods, mercury sensitized photochemical vapor deposition and plasma-enhanced chemical vapor deposition, at substrate temperatures of around 200°C using SiH4, H2 and C2H2. The vibration mode at 607 cm-1, which indicated the presence of the C atoms located at the Si substitutional sites, was observed in both Fourier transform infrared absorption and Raman scattering spectroscopy of the samples annealed at 600 to 700°C. The C composition was controlled by varying the C2H2/SiH4 ratio. The maximum substitutional C compositions of 2.3 at% and 2.7 at% were successfully obtained by mercury sensitized photochemical vapor deposition and plasma-enhanced chemical vapor deposition, respectively.
Title: Epitaxial Growth of Si1-yCy Film by Low Temperature Chemical Vapor Deposition
Description:
Epitaxial Si1-y
Cy films were grown on Si(100) by two methods, mercury sensitized photochemical vapor deposition and plasma-enhanced chemical vapor deposition, at substrate temperatures of around 200°C using SiH4, H2 and C2H2.
The vibration mode at 607 cm-1, which indicated the presence of the C atoms located at the Si substitutional sites, was observed in both Fourier transform infrared absorption and Raman scattering spectroscopy of the samples annealed at 600 to 700°C.
The C composition was controlled by varying the C2H2/SiH4 ratio.
The maximum substitutional C compositions of 2.
3 at% and 2.
7 at% were successfully obtained by mercury sensitized photochemical vapor deposition and plasma-enhanced chemical vapor deposition, respectively.
Related Results
Reclaiming the Wasteland: Samson and Delilah and the Historical Perception and Construction of Indigenous Knowledges in Australian Cinema
Reclaiming the Wasteland: Samson and Delilah and the Historical Perception and Construction of Indigenous Knowledges in Australian Cinema
It was always based on a teenage love story between the two kids. One is a sniffer and one is not. It was designed for Central Australia because we do write these kids off there. N...
Alternative Entrances: Phillip Noyce and Sydney’s Counterculture
Alternative Entrances: Phillip Noyce and Sydney’s Counterculture
Phillip Noyce is one of Australia’s most prominent film makers—a successful feature film director with both iconic Australian narratives and many a Hollywood blockbuster under his ...
Epitaxial Growth
Epitaxial Growth
Abstract
The sections in this article are
Introduction
The Epitaxial Process: General Features
...
EFEKTIFITAS JENIS DESIKAN DAN KECEPATAN UDARA TERHADAP PENYERAPAN UAP AIR DI UDARA
EFEKTIFITAS JENIS DESIKAN DAN KECEPATAN UDARA TERHADAP PENYERAPAN UAP AIR DI UDARA
Dry air is widely used in many fields, but the excessive water vapor in the air will make some problem and should be minimized to get the required dry air. The purpose of th...
Wax Deposition Correlation-Application in Multiphase Wax Deposition Models
Wax Deposition Correlation-Application in Multiphase Wax Deposition Models
Abstract
The two most dominant factors in wax deposition are:Brownian diffusion of wax forming molecules toward and adhesion of wax crystals at the wall. The rate...
Photoluminescence of Selectively Grown Epitaxial SiGe:C/Si layers
Photoluminescence of Selectively Grown Epitaxial SiGe:C/Si layers
Photoluminescence of strained Si1-x-yGexCy alloy layer and Si1-x-yGexCy /Si1-xGex structures selectively grown by RT-CVD is investigated. Spectroscopic PL at low temperature (14K) ...
Preparation, microstructure of B film and its applications in MgB2 superconducting Josephson junction
Preparation, microstructure of B film and its applications in MgB2 superconducting Josephson junction
Magnesium diboride is a binary compound with a simple AlB2 type crystal structure and a high-Tc (nearly 40 K) superconductor. The rather high Tc value and the specific properties m...
Structure Analysis of A-Si 1-xCx:H with Dominant Tetrahedral Si–C Bonds Deposited by Hybrid-Plasma Chemical Vapor Deposition
Structure Analysis of A-Si 1-xCx:H with Dominant Tetrahedral Si–C Bonds Deposited by Hybrid-Plasma Chemical Vapor Deposition
Hydrogenated amorphous silicon-carbon (a-Si1-x
C
x
:H) was deposited by a new deposition method of hybrid-plasma chemica...