Force Analysis of Magnetic Levitation Micromotion Stage

This A new method of magnetic levitation micromotion of AC / DC hybrid driving is presented in this paper presents, and a new magnetic levitation micromotion stage has been designed, which can be realized that the motion stage translationally motions, respectively along the three directions x-axis, y-axis, z-axis, and rotates respectively around the three directionsθxθyθz, namely, the micro-motion in the six-dimensional space of freedom, as well as the micro movement of the constant height. Force analysis has been carried out on the micromotion stage, and the relationship curve between the winding current and the air gap, as well as the force of the micromotion stage, has been drawn. Finally, the stability in the open-loop state and one-dimensional micro-movement of the magnetic levitation micromotion stage have been tested. According to the simulation result of the stability ,it shows that the stability of the magnetic levitation micromotion stage can be achieved at the equilibrium position, and according to the simulation result of the one-dimensional micro-movement ,it shows that the motion range whthin 50mm along the direction of x-axis can substantially coincide with the theoretical analysis. The feasibility of the design presented in this paper of the magnetic levitation micromotion stage can be validated by the simulation result of the stability and one-dimensional micro-movement.