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Dynamics of a Vibrating Micro Three-Axis Ring Gyroscope
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This paper presents electro-mechanical characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocity components about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support ligaments that are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-motion that are coupled by the gyro-effect due to the rotation of the gyroscope main body. The motions of the ring are electro-statically driven, sensed and balanced by electrodes. The equations of motion are formulated with considering the electrostatic effects of electrodes. The measuring method of angular velocities of the gyroscope main body by force-torebalance is proposed. The dynamic characteristics of the ring gyroscope are discussed.
Trans Tech Publications, Ltd.
Title: Dynamics of a Vibrating Micro Three-Axis Ring Gyroscope
Description:
This paper presents electro-mechanical characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocity components about three orthogonal axes.
The ring gyroscope has a ring connected to the gyroscope main body by support ligaments that are arranged with cyclic symmetry.
The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-motion that are coupled by the gyro-effect due to the rotation of the gyroscope main body.
The motions of the ring are electro-statically driven, sensed and balanced by electrodes.
The equations of motion are formulated with considering the electrostatic effects of electrodes.
The measuring method of angular velocities of the gyroscope main body by force-torebalance is proposed.
The dynamic characteristics of the ring gyroscope are discussed.
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