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Investigations on AuSi liquid alloy ion sources (abstract)
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We have done extensive investigations on AuSi liquid alloy ion sources of different alloy compositions. The influence of source temperature and tip radius on current–voltage characteristics, emission current stability, and angular distribution has been investigated. The results are compared with those of other investigated liquid alloy ion sources. The mass spectra were measured as a function of source current, source temperature, and source operating time. The sources were tested in the ETH/PSI 30 kV focused ion beam system in Zurich.
Title: Investigations on AuSi liquid alloy ion sources (abstract)
Description:
We have done extensive investigations on AuSi liquid alloy ion sources of different alloy compositions.
The influence of source temperature and tip radius on current–voltage characteristics, emission current stability, and angular distribution has been investigated.
The results are compared with those of other investigated liquid alloy ion sources.
The mass spectra were measured as a function of source current, source temperature, and source operating time.
The sources were tested in the ETH/PSI 30 kV focused ion beam system in Zurich.
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