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Investigation of Pt/Ti Bottom Electrodes for Pb(Zr,Ti)O 3 Films
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Pt films, as bottom electrodes for PZT capacitors, were deposited on Ti/SiO2/Si substrates using DC magnetron sputtering under various deposition conditions. The effects of post-annealing on surface morphology, element diffusion, microstructure and structural phase of the Pt films were investigated. The structure and electrical properties of PZT films deposited on Pt/Ti/SiO2/Si electrodes were also studied. As the deposition temperature of the Pt film increases and the deposition rate decreases, the film becomes dense so that Ti out-diffusion and film deformation are suppressed. The out-diffused Ti faciliates the formation of nucleation sites for perovskite PZT films. However, excess Ti out-diffusion not only decreases the total capacitance of the PZT films due to formation of an interfacial layer having a low dielectric constant but also degrades the leakage current characteristics of the PZT films due to deformation of the Pt electrode.
Title: Investigation of Pt/Ti Bottom Electrodes for Pb(Zr,Ti)O 3 Films
Description:
Pt films, as bottom electrodes for PZT capacitors, were deposited on Ti/SiO2/Si substrates using DC magnetron sputtering under various deposition conditions.
The effects of post-annealing on surface morphology, element diffusion, microstructure and structural phase of the Pt films were investigated.
The structure and electrical properties of PZT films deposited on Pt/Ti/SiO2/Si electrodes were also studied.
As the deposition temperature of the Pt film increases and the deposition rate decreases, the film becomes dense so that Ti out-diffusion and film deformation are suppressed.
The out-diffused Ti faciliates the formation of nucleation sites for perovskite PZT films.
However, excess Ti out-diffusion not only decreases the total capacitance of the PZT films due to formation of an interfacial layer having a low dielectric constant but also degrades the leakage current characteristics of the PZT films due to deformation of the Pt electrode.
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