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Preparation and Characterization of Sol-Gel Derived Heteroepitaxial LiNbO3 and LiTaO3 Thin Films
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AbstractDense epitaxial LiNbO3 thin films without any misoriented plane on sapphire substrates were obtained with a sol-gel process utilizing 2-methoxyethanol based metal alkoxide precursors without pre-hydrolysis and rapid thermal annealing. Epitaxial LiNbO3 films annealed at 700°C were transparent and showed refractive indices close to bulk single crystal values. Epitaxial and transparent LiTaO3 films crystallized successfully on sapphire substrates with single orientations with the present process. X-ray rocking curve full widths at half maximum of epitaxial LiNbO3 and LiTaO3 films on sapphire (110) substrates and annealed at 700°C were less than 0.4 degree.
Title: Preparation and Characterization of Sol-Gel Derived Heteroepitaxial LiNbO3 and LiTaO3 Thin Films
Description:
AbstractDense epitaxial LiNbO3 thin films without any misoriented plane on sapphire substrates were obtained with a sol-gel process utilizing 2-methoxyethanol based metal alkoxide precursors without pre-hydrolysis and rapid thermal annealing.
Epitaxial LiNbO3 films annealed at 700°C were transparent and showed refractive indices close to bulk single crystal values.
Epitaxial and transparent LiTaO3 films crystallized successfully on sapphire substrates with single orientations with the present process.
X-ray rocking curve full widths at half maximum of epitaxial LiNbO3 and LiTaO3 films on sapphire (110) substrates and annealed at 700°C were less than 0.
4 degree.
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