Search engine for discovering works of Art, research articles, and books related to Art and Culture
Javascript must be enabled to continue!
Epitaxial Growth of SrTiO3 Films on Si(100) Substrates Using a Focused Electron Beam Evaporation Method
View through CrossRef
A novel epitaxial growth method of SrTiO3 films on Si(100) substrates is presented in which, in order to reduce the surface oxide layers of the substrates, thin Sr layers are deposited prior to deposition of SrTiO3 films. It has been shown that the film composition becomes nearly stoichiometric when single-crystalline SrTiO3 sources are evaporated by a focused electron beam and that SrTiO3 films grow epitaxially on Si(100) substrates under the optimum conditions of the Sr layer thickness, deposition temperature, and annealing temperature.
Title: Epitaxial Growth of SrTiO3 Films on Si(100) Substrates Using a Focused Electron Beam Evaporation Method
Description:
A novel epitaxial growth method of SrTiO3 films on Si(100) substrates is presented in which, in order to reduce the surface oxide layers of the substrates, thin Sr layers are deposited prior to deposition of SrTiO3 films.
It has been shown that the film composition becomes nearly stoichiometric when single-crystalline SrTiO3 sources are evaporated by a focused electron beam and that SrTiO3 films grow epitaxially on Si(100) substrates under the optimum conditions of the Sr layer thickness, deposition temperature, and annealing temperature.
Related Results
Evolution of Antimicrobial Resistance in Community vs. Hospital-Acquired Infections
Evolution of Antimicrobial Resistance in Community vs. Hospital-Acquired Infections
Abstract
Introduction
Hospitals are high-risk environments for infections. Despite the global recognition of these pathogens, few studies compare microorganisms from community-acqu...
Role of Cathode-Electrolyte-Ferroelectric Interface for High Performance Lithium Ion Battery
Role of Cathode-Electrolyte-Ferroelectric Interface for High Performance Lithium Ion Battery
Next generation lithium ion battery(LIB) should be endowed with a performance of high-speed chargeability and dischargeability. LiCoO2is commercially used as a cathode material of ...
Alternative Entrances: Phillip Noyce and Sydney’s Counterculture
Alternative Entrances: Phillip Noyce and Sydney’s Counterculture
Phillip Noyce is one of Australia’s most prominent film makers—a successful feature film director with both iconic Australian narratives and many a Hollywood blockbuster under his ...
Spray Coated Nanocellulose Films Productions, Characterization and Application
Spray Coated Nanocellulose Films Productions, Characterization and Application
Nanocellulose (NC) is a biodegradable, renewable and sustainable material. It has strong potential to use as a functional material in various applications such as barriers, coating...
Preparation and Characterization of Sol-Gel Derived Epitaxial and Oriented Pb(Zr0.52Ti0.48)O3 Thin Films
Preparation and Characterization of Sol-Gel Derived Epitaxial and Oriented Pb(Zr0.52Ti0.48)O3 Thin Films
Epitaxial and oriented Pb(Zr0.52Ti0.48)O3 (PZT) thin films were prepared from nonhydrolyzed polymeric precursors. PZT thin films with a single (001) orientation were prepared ...
High‐Throughput Design of Epitaxial Orientation for Functional Thin Films
High‐Throughput Design of Epitaxial Orientation for Functional Thin Films
AbstractThe structure and properties of functional thin films are highly sensitive to their epitaxial orientations. However, the orientation of the thin film is typically constrain...
Roles of Buffer Layers in Epitaxial Growth of SrTiO3 Films on Silicon Substrates
Roles of Buffer Layers in Epitaxial Growth of SrTiO3 Films on Silicon Substrates
Heteroepitaxial growth of SrTiO3 (STO) films with and without buffer layers on Si(100) and (111) substrates has been conducted by a focused electron beam evaporation method. It ...
Epitaxial Growth of Perovskite Type Oxide Films OH Si Substrates
Epitaxial Growth of Perovskite Type Oxide Films OH Si Substrates
ABSTRACTEpitaxial growth conditions of perovskite type oxide films on Si substrates are theoretically considered from a viewpoint of lattice matching. Then, epitaxial growth of SrT...