Opportunities and Challenges in Micropump Technology

The rapidly growing applications in micro fluidic systems, biotechnology, micro chemical analysis systems, drug delivery systems, and chip-integrated cooling systems has introduced new opportunities and challenges in developing micropumps. Micropumps are one of the crucial components for moving liquids in these miniaturized systems. In this article, the focus is placed on both fundamental scientific and application specific issues. First, a brief review of the growing need for micropumps and the state of the art materials and fabrication technologies is presented. Next, the various pumping techniques, their working principle and their potential applicability to the future development of cost-effective miniature systems are discussed. Finally, selected results of an electrohydrodynamic micropump are presented.