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Recent Progress in Micromachining and Applications to Microactuators
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The successful fabrication and operation of microactuators and micromechanical parts
by IC-based micromachining technology has provided the opportunity to produce microelectromechanical
systems (MEMS) or micromachines. This paper deals with the recent progress in micromachining
processes and microactuators fabricated by them. A system architecture suitable for MEMS
and applications of MEMS are also discussed.
Title: Recent Progress in Micromachining and Applications to Microactuators
Description:
The successful fabrication and operation of microactuators and micromechanical parts
by IC-based micromachining technology has provided the opportunity to produce microelectromechanical
systems (MEMS) or micromachines.
This paper deals with the recent progress in micromachining
processes and microactuators fabricated by them.
A system architecture suitable for MEMS
and applications of MEMS are also discussed.
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