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Characterization of extremely thin epitaxial layers and films by new interference fringes
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The existence and imperfection of several types of epitaxial layers and films on the substrate crystals were successfully detected and characterized nondestructively using a new interference fringes method. It was found that the interference fringes generated by amorphous thin films showed many very tiny bright spots that became discontinuous, which was quite different from the case of fringes generated by a crystalline epitaxially grown layer (smooth fringes). Multiple layers on a substrate were also observed by the fringes that were not concentric, but interlacing.
Springer Science and Business Media LLC
Title: Characterization of extremely thin epitaxial layers and films by new interference fringes
Description:
The existence and imperfection of several types of epitaxial layers and films on the substrate crystals were successfully detected and characterized nondestructively using a new interference fringes method.
It was found that the interference fringes generated by amorphous thin films showed many very tiny bright spots that became discontinuous, which was quite different from the case of fringes generated by a crystalline epitaxially grown layer (smooth fringes).
Multiple layers on a substrate were also observed by the fringes that were not concentric, but interlacing.
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