Search engine for discovering works of Art, research articles, and books related to Art and Culture
Javascript must be enabled to continue!
Microcrystalline Silicon Films Deposited by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition Using Helium Gas
View through CrossRef
We have investigated the growth of microcrystalline silicon films by electron cyclotron resonance plasma chemical vapor deposition (ECR-PCVD) using He as the ECR gas at substrate temperatures in the range of 180 to 550°C with He to silane ratios (He/SiH4) of 1, 4, and 9. With ratios of 4 and 9, the volume fractions of microcrystalline silicon increase with temperature and exceed 90% at 550°C. To study the role of He plasma, we prepared silicon films using a layer-by-layer technique and found that long exposure to He plasma changes the structure of amorphous silicon to microcrystalline.
Title: Microcrystalline Silicon Films Deposited by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition Using Helium Gas
Description:
We have investigated the growth of microcrystalline silicon films by electron cyclotron resonance plasma chemical vapor deposition (ECR-PCVD) using He as the ECR gas at substrate temperatures in the range of 180 to 550°C with He to silane ratios (He/SiH4) of 1, 4, and 9.
With ratios of 4 and 9, the volume fractions of microcrystalline silicon increase with temperature and exceed 90% at 550°C.
To study the role of He plasma, we prepared silicon films using a layer-by-layer technique and found that long exposure to He plasma changes the structure of amorphous silicon to microcrystalline.
Related Results
Alternative Entrances: Phillip Noyce and Sydney’s Counterculture
Alternative Entrances: Phillip Noyce and Sydney’s Counterculture
Phillip Noyce is one of Australia’s most prominent film makers—a successful feature film director with both iconic Australian narratives and many a Hollywood blockbuster under his ...
The principles of helium exploration
The principles of helium exploration
Commercial helium systems have been found to date as a serendipitous by-product of petroleum exploration. There are nevertheless significant differences in the source and migration...
A Study on the Relation between Film Quality and Deposition Rate for Amorphous Silicon Films Grown by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition Using H 2/SiH 4
A Study on the Relation between Film Quality and Deposition Rate for Amorphous Silicon Films Grown by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition Using H 2/SiH 4
The relation between film quality and deposition rate of hydrogenated amorphous silicon films deposited by electron cyclotron resonance plasma chemical vapor deposition using ...
Helium Signatures of Natural Gas From the Dongpu Sag, Bohai Bay Basin, Eastern China
Helium Signatures of Natural Gas From the Dongpu Sag, Bohai Bay Basin, Eastern China
The Dongpu Sag is one of the important areas for oil and gas exploration in the Bohai Bay Basin, eastern China, and natural gas from different strata in the sag contain a certain a...
Magnetohydrodynamics enhanced radio blackout mitigation system for spacecraft during planetary entries
Magnetohydrodynamics enhanced radio blackout mitigation system for spacecraft during planetary entries
(English) Spacecraft entering planetary atmospheres are enveloped by a plasma layer with high levels of ionization, caused by the extreme temperatures in the shock layer. The charg...
Desarrollo de nuevas estructuras laminares de nanocelulosa con propiedades avanzadas para el packaging
Desarrollo de nuevas estructuras laminares de nanocelulosa con propiedades avanzadas para el packaging
(English) Changes in the use of raw materials and major lifestyle changes in first world societies have driven the massive use of petroleum-based materials in a wide range of appli...
Comportement de l’hélium implanté dans le carbure de bore B4C
Comportement de l’hélium implanté dans le carbure de bore B4C
Le carbure de bore B4C est une céramique couramment utilisée comme absorbant neutronique pour la régulation de la puissance des réacteurs nucléaires. Les réactions d’absorption neu...
Irreversible thermochromic response of RF sputtered nanocrystalline BaWO4 films for smart window applications
Irreversible thermochromic response of RF sputtered nanocrystalline BaWO4 films for smart window applications
We report irreversible thermochromic behaviour of BaWO4 (BWO) films for the first time. BWO films have been deposited at different substrate temperatures (RT, 200, 400, 600 and 800...