Space Environment Adaptation of MEMS Accelerometers for Deep Space Sample Returns

Abstract The advent of China’s advanced aerospace technology has precipitated a marked increase in the demand for lightweight, compact inertial devices for utilization in spacecraft. It is imperative to examine the space environment effects of micro electromechanical system (MEMS) accelerometers to ensure their longevity and reliability during on-orbit operations. A comprehensive investigation into the impact of the space environment on MEMS accelerometers is imperative to ensure their longevity and reliability during orbit. A study was conducted to investigate the effects of total ionizing dose irradiation and single-particle irradiation on the electrical performance of a capacitive MEMS accelerometer intended for use in a deep-space probe. The research involved the examination of the accelerometer under different irradiation doses with various typical eigenvalues and electron radiation tests with different dose rates. The findings indicate that the capacitive MEMS accelerometer does not demonstrate any anomalies following total ionizing dose irradiation up to 15 krad (Si). Furthermore, the single event latch-up (SEL) phenomenon did not occur in the accelerometer when the single particle irradiation was carried out up to 4 MeV.cm 2 /mg. However, at 13.4 MeV.cm 2 /mg, the single event latch-up occurred in the accelerometer, indicating that the accelerometer is vulnerable to single event latch-up. The simulation verification was conducted on the recovery control system to verify the risk posed by this weak link. The results indicate that, in extreme cases, the single particle locking of the accelerometer will not cause failure to spread to the peripheral circuit of the recovery control system and the recovery control system will continue to function normally.