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Single-step etching fabrication of diffractive microlens on high-energy-beam sensitive glass
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Diffractive microlens has a variety of applications including spot array generation, optical or hybrid opto-electronic interconnections, Fourier transformation, imaging, focusing, collimating, coupling, and beam shaping.[1-4] Diffractive microlens is also important for printing, optical data storage, and display applications. High lens efficiency is often required to minimize unwanted zero-order non-diffracted light beams that are responsible for optical crosstalks and background noises. High diffraction efficiency can be achieved by increasing number of phase levels of surface relief diffractive microlens structures.
Title: Single-step etching fabrication of diffractive microlens on high-energy-beam sensitive glass
Description:
Diffractive microlens has a variety of applications including spot array generation, optical or hybrid opto-electronic interconnections, Fourier transformation, imaging, focusing, collimating, coupling, and beam shaping.
[1-4] Diffractive microlens is also important for printing, optical data storage, and display applications.
High lens efficiency is often required to minimize unwanted zero-order non-diffracted light beams that are responsible for optical crosstalks and background noises.
High diffraction efficiency can be achieved by increasing number of phase levels of surface relief diffractive microlens structures.
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