Single-step etching fabrication of diffractive microlens on high-energy-beam sensitive glass

Diffractive microlens has a variety of applications including spot array generation, optical or hybrid opto-electronic interconnections, Fourier transformation, imaging, focusing, collimating, coupling, and beam shaping.[1-4] Diffractive microlens is also important for printing, optical data storage, and display applications. High lens efficiency is often required to minimize unwanted zero-order non-diffracted light beams that are responsible for optical crosstalks and background noises. High diffraction efficiency can be achieved by increasing number of phase levels of surface relief diffractive microlens structures.