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Aberration-corrected etched microlens arrays
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Refractive microlens arrays can be made through reactive ion etching of melted photoresist microlenses. We report fabrication of fused silica microlens arrays with reduced aberration by controlling the relative etch rates of silica and photoresist. An example is presented and implications are discussed.
Optica Publishing Group
Title: Aberration-corrected etched microlens arrays
Description:
Refractive microlens arrays can be made through reactive ion etching of melted photoresist microlenses.
We report fabrication of fused silica microlens arrays with reduced aberration by controlling the relative etch rates of silica and photoresist.
An example is presented and implications are discussed.
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