Technologies for Fabricating Large Aperture Diffraction Gratings

Large diffraction gratings have played an important role in modern scientific fields such as inertial confinement fusion, large-aperture astronomical telescopes, and high-precision immersion lithography machines with long-stroke displacement stages. However, due to the large size and high accuracy requirements of gratings, and considering the high efficiency and low cost, the fabrication of large gratings is extremely difficult. This paper reviews the fabrication technologies for large diffraction gratings, including the grating tiling technology, the grating ruling technology, the single exposure lithography, the optical mosaic grating technology, and the scanning beam interference lithography. It introduces the basic principles, representative research, and research progress of these technologies, analyzes their advantages and current problems, and provides reference for the development and optimization of the fabrication technologies of large diffraction gratings.