The Electrical Signals Measurement for Silicon Nanowires pH Sensor

In this work, we report the geometrical characteristics and the electrical performance of silicon nanowires array for pH level detection. The smallest silicon nanowires structure is 40 nm width and 400 μm length. The Silicon Nanowires Array is tested with pH buffer solutions of pH4, pH7 amd pH10. Direct current (DC) measurement is the most common method of detecting the electrical signals of silicon nanowires sensor. The results show that the IV characteristic is directly proportional and the pH sensitivity calculated from linear relation between the drain-source current vs the pH value was 1.4nA/pH. These results are important for future biosensing experiments and data analysis using Silicon Nanowires Array devices.