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A Novel Multifunctional Piezoelectric Microcantilever Sensor
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In this paper a new theoretical method is developed for finding the amount and position of forces and or mass acting on a piezoelectric microcantilever sensor. In this proposed method, the mechanical parameter of microcantilever and accordingly the response of microcantilever to the forces will be changed by exerting the compression force within microcantilever, via applying different voltage to piezoelectric layers. In addition to some theoretical computations, these results generate an inverse problem to deduce the forces and their positions.
Title: A Novel Multifunctional Piezoelectric Microcantilever Sensor
Description:
In this paper a new theoretical method is developed for finding the amount and position of forces and or mass acting on a piezoelectric microcantilever sensor.
In this proposed method, the mechanical parameter of microcantilever and accordingly the response of microcantilever to the forces will be changed by exerting the compression force within microcantilever, via applying different voltage to piezoelectric layers.
In addition to some theoretical computations, these results generate an inverse problem to deduce the forces and their positions.
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