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Movpe growth of nitrides
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Abstract
Finding a proper group III precursor for growth of nitrides is an easy thing, since well-suited molecules have been developed, purified, and tested for the growth of the other III-V materials. The ‘simplest’ trimethyl, triethyl molecules are widely available, in very high purities, but more complicated molecules were also developed for specific purposes, which can be tested to grow nitrides.
Title: Movpe growth of nitrides
Description:
Abstract
Finding a proper group III precursor for growth of nitrides is an easy thing, since well-suited molecules have been developed, purified, and tested for the growth of the other III-V materials.
The ‘simplest’ trimethyl, triethyl molecules are widely available, in very high purities, but more complicated molecules were also developed for specific purposes, which can be tested to grow nitrides.
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