Search engine for discovering works of Art, research articles, and books related to Art and Culture
Javascript must be enabled to continue!
Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type
View through CrossRef
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.
Title: Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type
Description:
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed.
The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc.
(Durham, NC, USA).
A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors.
Electrothermal actuation has achieved a large angular movement in the micromirrors.
Application of an external electric current 0.
04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.
69°, 3.
28°, and 3.
64°, respectively.
Related Results
Analysing “Dr Sachin's criteria” for Adnexal Torsion Management & its Variable
Analysing “Dr Sachin's criteria” for Adnexal Torsion Management & its Variable
Introduction Adnexal torsion is 5th most common gynaecological emergency occurring in about 2 - 15% of reproductive age group women, wherein both ovary and fallopian tube twist al...
Closed Form Solutions for the Statical Behavior of Micromirrors Under Capillary Forces
Closed Form Solutions for the Statical Behavior of Micromirrors Under Capillary Forces
In this paper, the static behavior of micromirrors under the effect of capillary forces is studied. First the equation governing the static behavior of micromirrors is obtained usi...
Development of Light Weight, Low Cost Pleated Soft Actuators
Development of Light Weight, Low Cost Pleated Soft Actuators
Abstract
Soft pneumatic actuators are a useful type of actuator for compliant structures, including inflatable robots, morphing wings, and assistive devices for astr...
Is testicular torsion a real problem in pediatric patients with cryptorchidism?
Is testicular torsion a real problem in pediatric patients with cryptorchidism?
Abstract
PurposeTo present management and outcomes of patients with cryptorchidism suffering from testicular torsion.MethodsThis is a retrospective review of pediatric pati...
Ovarian Torsion in Normal Ovaries in Reproductive‐Aged Women
Ovarian Torsion in Normal Ovaries in Reproductive‐Aged Women
Ovarian torsion is a gynecological emergency caused by the rotation of an ovary on its supporting ligaments, which can obstruct blood flow and lead to ovarian necrosis if untreated...
Research Status and Trend of Axis-torsion Two-Component Force Senso
Research Status and Trend of Axis-torsion Two-Component Force Senso
Axis-torsion two-component force sensor can simultaneously detect axial force and torque component information. With the progress of modern engineering technology and the improveme...
Laser bending of steel sheets: corrosion testing of bended sections
Laser bending of steel sheets: corrosion testing of bended sections
Purpose
Laser bending is a good candidate to replace the flame bending process. The electrochemical response of laser bending region changes due to the microstruc...
Recent Patents on Artificial Muscle Actuators
Recent Patents on Artificial Muscle Actuators
Background:
With the development of automation technology, various actuators are
widely used in fields such as robotics and biomedical equipment. However, traditional mechanical
ac...