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Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type
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Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.
Title: Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type
Description:
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed.
The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc.
(Durham, NC, USA).
A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors.
Electrothermal actuation has achieved a large angular movement in the micromirrors.
Application of an external electric current 0.
04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.
69°, 3.
28°, and 3.
64°, respectively.
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