Search engine for discovering works of Art, research articles, and books related to Art and Culture
Javascript must be enabled to continue!
Infrared spectroscopic ellipsometry study of sulfur-doped In0.53Ga0.47As ultra-shallow junctions
View through CrossRef
Sulfur mono-layer doped In0.53Ga0.47As films were investigated by infrared spectroscopic ellipsometry. The complex dielectric function of doped layers shows free carrier response which can be described by a single Drude oscillator. Electrical resistivities, carrier relaxation times, and active carrier depths are obtained for the shallow n-In0.53Ga0.47As films. Our results indicate that sub-10 nm sulfur-doped layers with active carrier concentration as high as 1.7 × 1019 cm−3 were achieved. Sheet resistances estimated from infrared spectroscopic ellipsometry are in good agreement with those obtained by electrical methods.
Title: Infrared spectroscopic ellipsometry study of sulfur-doped In0.53Ga0.47As ultra-shallow junctions
Description:
Sulfur mono-layer doped In0.
53Ga0.
47As films were investigated by infrared spectroscopic ellipsometry.
The complex dielectric function of doped layers shows free carrier response which can be described by a single Drude oscillator.
Electrical resistivities, carrier relaxation times, and active carrier depths are obtained for the shallow n-In0.
53Ga0.
47As films.
Our results indicate that sub-10 nm sulfur-doped layers with active carrier concentration as high as 1.
7 × 1019 cm−3 were achieved.
Sheet resistances estimated from infrared spectroscopic ellipsometry are in good agreement with those obtained by electrical methods.
Related Results
Negative temperature dependence of electron multiplication in In0.53Ga0.47As
Negative temperature dependence of electron multiplication in In0.53Ga0.47As
Electron multiplication in In0.53Ga0.47As has been determined from photomultiplication measurements over the temperature range of 20 to 400 K for a series of p–i–n diodes. A negati...
Ellipsometry
Ellipsometry
AbstractEllipsometry, also known as reflection polarimetry or polarimetric spectroscopy, is a classical and precise method for determining the optical constants, thickness, and nat...
Surface chemical reactions on In0.53Ga0.47As
Surface chemical reactions on In0.53Ga0.47As
Dark currents on In0.53Ga0.47As mesa photodiodes can be reduced significantly by treating the surfaces with H2SO4:H2O2:XH2O (10≤X≤500) instead of the usual bromine-methanol etch. U...
Electrode Design for Lithium-Sulfur Batteries Featuring High Sulfur Loading and Low Electrolyte
Electrode Design for Lithium-Sulfur Batteries Featuring High Sulfur Loading and Low Electrolyte
The limitations encountered by insertion-compound cathodes for offering lithium batteries with an enhanced energy density at an affordable cost allow the conversion-reaction cathod...
Analysis of trap state densities at HfO2/In0.53Ga0.47As interfaces
Analysis of trap state densities at HfO2/In0.53Ga0.47As interfaces
HfO 2 was deposited on n- and p-type In0.53Ga0.47As by chemical beam deposition. Interface trap densities (Dit) and their energy level distribution were quantified using the conduc...
Carrier transport in ordered and disordered In0.53Ga0.47As
Carrier transport in ordered and disordered In0.53Ga0.47As
Room temperature recombination dynamics have been studied in partially ordered and disordered ternary alloys of In0.53Ga0.47As by correlated measurements of transmission electron d...
Hydrothermal synthesis of carbon and sulfur mono-doped sodium tantalates
Hydrothermal synthesis of carbon and sulfur mono-doped sodium tantalates
A set of experiments was conducted to synthesize doped and undoped sodium tantalates with carbon and sulfur in energy efficient single-step hydrothermal process. Undoped sodium tan...
A retrospective analysis of nitric oxide inhalation in patients with severe acute lung injury in Sweden and Norway 1991–1994
A retrospective analysis of nitric oxide inhalation in patients with severe acute lung injury in Sweden and Norway 1991–1994
Background: Patients with severe acute lung injury (ALI) have been treated compassionately on doctors' initiative with inhaled nitric oxide (INO) in Sweden and Norway since 1991. I...