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Brillouin Scattering Study of Elastic Properties of Transition-Metal Nitride Superlattices

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Surface acoustic waves of transition-metal nitride TiN/CrN superlattices prepared on MgO (001) and glass substrates have been examined by Brillouin scattering. The superlattices were capped by a 15-nm-thick Al layer to enhance the Brillouin scattering efficiency. Scattering from the Rayleigh wave and the longitudinal guided wave have been observed. The Rayleigh wave velocity is independent of the superlattice period in a range of 30 to 0.6 nm. On the other hand, the longitudinal guided mode velocities exhibit a softening of about 10% and show a minimum at around 5 nm and 3 nm of the superlattice periods for the glass and MgO substrate superlattices, respectively.
Title: Brillouin Scattering Study of Elastic Properties of Transition-Metal Nitride Superlattices
Description:
Surface acoustic waves of transition-metal nitride TiN/CrN superlattices prepared on MgO (001) and glass substrates have been examined by Brillouin scattering.
The superlattices were capped by a 15-nm-thick Al layer to enhance the Brillouin scattering efficiency.
Scattering from the Rayleigh wave and the longitudinal guided wave have been observed.
The Rayleigh wave velocity is independent of the superlattice period in a range of 30 to 0.
6 nm.
On the other hand, the longitudinal guided mode velocities exhibit a softening of about 10% and show a minimum at around 5 nm and 3 nm of the superlattice periods for the glass and MgO substrate superlattices, respectively.

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