Search engine for discovering works of Art, research articles, and books related to Art and Culture
Javascript must be enabled to continue!
Chemical vapor deposition of titanium nitride thin films from tetrakis(dimethylamido)titanium and hydrazine as a coreactant
View through CrossRef
Hydrazine was used as a coreactant with tetrakis(dimethylamido)titanium for the low-temperature chemical vapor deposition of TiN between 50 and 200 °C. The TiN film-growth rates ranged from 5 to 45 nm/min. Ti:N ratios of approximately 1:1 were achieved. The films contain between 2 and 25 at.% carbon, as well as up to 36 at.% oxygen resulting from diffusion after air exposure. The resistivity of these films is approximately 104 μΩ cm. Annealing the films in ammonia enhances their crystallinity. The best TiN films were produced at 200 °C from a 2.7% hydrazine–ammonia mixture. The Ti:N ratio of these films is approximately 1:1, and they contain no carbon or oxygen. These films exhibit the highest growth rates observed.
Springer Science and Business Media LLC
Title: Chemical vapor deposition of titanium nitride thin films from tetrakis(dimethylamido)titanium and hydrazine as a coreactant
Description:
Hydrazine was used as a coreactant with tetrakis(dimethylamido)titanium for the low-temperature chemical vapor deposition of TiN between 50 and 200 °C.
The TiN film-growth rates ranged from 5 to 45 nm/min.
Ti:N ratios of approximately 1:1 were achieved.
The films contain between 2 and 25 at.
% carbon, as well as up to 36 at.
% oxygen resulting from diffusion after air exposure.
The resistivity of these films is approximately 104 μΩ cm.
Annealing the films in ammonia enhances their crystallinity.
The best TiN films were produced at 200 °C from a 2.
7% hydrazine–ammonia mixture.
The Ti:N ratio of these films is approximately 1:1, and they contain no carbon or oxygen.
These films exhibit the highest growth rates observed.
Related Results
Low Temperature Chemical Vapor Deposition of Titanium Nitride Thin Films With Hydrazine and Tetrakis-(dimethylamide)Titanium
Low Temperature Chemical Vapor Deposition of Titanium Nitride Thin Films With Hydrazine and Tetrakis-(dimethylamide)Titanium
AbstractHydrazine and tetrakis-(dimethylamido)titanium have been used as precursors for the low temperature chemical vapor deposition of TiN thin films between 50°C and 200°C at gr...
Alternative Entrances: Phillip Noyce and Sydney’s Counterculture
Alternative Entrances: Phillip Noyce and Sydney’s Counterculture
Phillip Noyce is one of Australia’s most prominent film makers—a successful feature film director with both iconic Australian narratives and many a Hollywood blockbuster under his ...
Desarrollo de nuevas estructuras laminares de nanocelulosa con propiedades avanzadas para el packaging
Desarrollo de nuevas estructuras laminares de nanocelulosa con propiedades avanzadas para el packaging
(English) Changes in the use of raw materials and major lifestyle changes in first world societies have driven the massive use of petroleum-based materials in a wide range of appli...
Synthesis of Amorphous Carbon Nitride Films Using Dissociative Excitation Reaction
Synthesis of Amorphous Carbon Nitride Films Using Dissociative Excitation Reaction
In this investigation, we aim to produce highly nitrogen-doped carbon, so-called carbon nitride, films without the incorporation of hydrogen. In the physical vapor deposition proce...
Splitting of the disulfide bonds in polysulfide polymers by hydrazine
Splitting of the disulfide bonds in polysulfide polymers by hydrazine
AbstractThe action of hydrazine on desulfurized tetrasulfide polymer obtained from bis‐2‐chloroethyl formal leads to SS bond splitting and depolymerization. Our studies show that ...
Spray Coated Nanocellulose Films Productions, Characterization and Application
Spray Coated Nanocellulose Films Productions, Characterization and Application
Nanocellulose (NC) is a biodegradable, renewable and sustainable material. It has strong potential to use as a functional material in various applications such as barriers, coating...
Colorimetric Method for Detection of Hydrazine Decomposition in Chemical Decontamination Process
Colorimetric Method for Detection of Hydrazine Decomposition in Chemical Decontamination Process
The aim of nuclear facility decommissioning is to make local settlements safe, sustainable and professedly acceptable. The challenges are the clean-up of the nuclear site and waste...
Water resources assessment in cold regions: the Upper Tuul River basin, Mongolia
Water resources assessment in cold regions: the Upper Tuul River basin, Mongolia
Groundwater withdrawals are growing in most developing countries, including Mongolia, where freshwater resources are limited and unevenly distributed, and most surface waters are f...