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Flexure Design for Eight-Bar Rectilinear Motion Mechanism
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This paper replaces the hinged pivots of an eight-bar linkage with flexure joints in order to achieve a flexure-connected linkage system that guides rectilinear movement of its end-effector. The goal is a linkage design that can be reduced in size to provide a suspension for the proof masses of a MEMS gyroscope. The symmetric design of the linkage and its long travel relative to other MEMS suspensions has the potential to provide a number of advantages, such as the reduction of quadrature error. The design presented yields 0.1% deviation over its range of movement. An example also presents the driving linkage of the MEMS gyroscope, which is also designed as flexure connected linkage.
American Society of Mechanical Engineers
Title: Flexure Design for Eight-Bar Rectilinear Motion Mechanism
Description:
This paper replaces the hinged pivots of an eight-bar linkage with flexure joints in order to achieve a flexure-connected linkage system that guides rectilinear movement of its end-effector.
The goal is a linkage design that can be reduced in size to provide a suspension for the proof masses of a MEMS gyroscope.
The symmetric design of the linkage and its long travel relative to other MEMS suspensions has the potential to provide a number of advantages, such as the reduction of quadrature error.
The design presented yields 0.
1% deviation over its range of movement.
An example also presents the driving linkage of the MEMS gyroscope, which is also designed as flexure connected linkage.
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