Piezoelectric Actuators – Recent Innovations 2024 –

This article reviews recent innovations in piezoelectric actuators, then indicates the future research targets. In the materials, the piezoelectric performances of relaxor-lead titanate (PZN-PT, PMN-PT) single crystals have been improved significantly by an AC electric poling technique. Also new loss characterization techniques facilitate developing high-power density piezoelectrics. The RMS vibration velocity reaches 0.6 m/s in the k31 mode in lead zirconate titanate (PZT) nowadays, which corresponds to power density 30 W/cm3. Pb-free materials are urged due to the recent political regulation on toxic materials. In device designs, the original multilayer actuators (MLA) with Ag/Pd electrode have been switched to the ones with Cu or pure Ag, in order to suppress the heat generation, then to enhance the device power density. Piezoelectric micro-electro-mechanical-systems (MEMS’s) started to utilize the <1 0 0> oriented epitaxial films of rhombohedral PZT compositions, which exhibits enhanced piezoelectric properties. Also for higher-power applications, aero-sol deposition (AD) methods have been introduced to 10 -thick films. Regarding drive/control techniques in piezo-actuators, three developments are on-going, that is, “negative capacitance” power supplies for driving off-resonance (pseudo-DC) piezo-actuators, capacitive AC power supplies for efficiently driving resonance piezo-actuators, and DC/DC converters for harvesting electric energy from high-impedance piezoelectric devices under noise vibration. The applications of piezoelectric actuators in the 21st century seem to be oriented toward “politico-engineering” with four keywords, “cooperation, protection, reduction, and continuation”. The sustainability technologies include the following piezoelectric items: (a) Pb-free piezoelectrics, (b) ultrasonic technology for decomposing hazardous materials, (c) reduction of contamination gas, (d) piezoelectric energy harvesting, and (e) device improvement with high energy-efficiency. On the other hand, the following crisis technologies have been developed with piezoelectrics: (a) detection and neutralization technologies of infectious/epidemic diseases such as anthrax, (b) autonomous unmanned underwater, aerial, and land vehicles with piezoelectric actuators, (c) pin-point target weapons, (d) high voltage supplies with piezoelectric transformers, and (e) compact energy sources for remote actuating/sensing systems.