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Piezoelectric Micromachined Ultrasonic Transducer with a Dome-Shaped Single Layer Structure
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Piezoelectric micromachined ultrasonic transducers (pMUTs) have been investigated as a promising new approach for ultrasound generation and reception. Most of the reported pMUTs employs a unimorph structure of a micromachined piezoelectric thin film on a silicon membrane. In this paper, a dome-shaped model for piezoelectric micromachined ultrasonic transducer (pMUT) was proposed to replace the conventional unimorph structure. A finite element analysis was carried out to study the elecro-mechanical behaviour of the dome-shaped model. The result showed that a considerable improvement of electro-mechanical coupling performance was achieved with the new model.
Title: Piezoelectric Micromachined Ultrasonic Transducer with a Dome-Shaped Single Layer Structure
Description:
Piezoelectric micromachined ultrasonic transducers (pMUTs) have been investigated as a promising new approach for ultrasound generation and reception.
Most of the reported pMUTs employs a unimorph structure of a micromachined piezoelectric thin film on a silicon membrane.
In this paper, a dome-shaped model for piezoelectric micromachined ultrasonic transducer (pMUT) was proposed to replace the conventional unimorph structure.
A finite element analysis was carried out to study the elecro-mechanical behaviour of the dome-shaped model.
The result showed that a considerable improvement of electro-mechanical coupling performance was achieved with the new model.
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