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Epitaxial Growth
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Abstract
The sections in this article are
Introduction
The Epitaxial Process: General Features
Surface Thermodynamics and Surface Structure
Surface Transport and Incorporation
Growth Behaviors
Chemical Vapor Deposition: Technology and Issues
Reactors: Mass, Fluid, and Thermal Transport
Fluid Behavior and Reactor Design
Mass and Thermal Transport
Gas Phase and Surface Chemistry
Liquid Phase Epitaxy (
LPE
) Technology
LPE
Growth Procedures
Molecular Beam Epitaxy (
MBE
) Technology
Specific Epitaxial Systems: Materials and Growth Issues
Silicon Chemical Vapor Deposition
Silicon Chemical Vapor Deposition: Surface and Reactor Considerations
Silicon Chemical Vapor Deposition: Growth Chemistry
Heterojunction Formation
Impurity Incorporation
Ga
As
MBE
Growth of
Al
Ga
As
by
LPE
In
P
Metal Organic Vapor Phase Epitaxy (
MOVPE
)
Acknowledgements
Title: Epitaxial Growth
Description:
Abstract
The sections in this article are
Introduction
The Epitaxial Process: General Features
Surface Thermodynamics and Surface Structure
Surface Transport and Incorporation
Growth Behaviors
Chemical Vapor Deposition: Technology and Issues
Reactors: Mass, Fluid, and Thermal Transport
Fluid Behavior and Reactor Design
Mass and Thermal Transport
Gas Phase and Surface Chemistry
Liquid Phase Epitaxy (
LPE
) Technology
LPE
Growth Procedures
Molecular Beam Epitaxy (
MBE
) Technology
Specific Epitaxial Systems: Materials and Growth Issues
Silicon Chemical Vapor Deposition
Silicon Chemical Vapor Deposition: Surface and Reactor Considerations
Silicon Chemical Vapor Deposition: Growth Chemistry
Heterojunction Formation
Impurity Incorporation
Ga
As
MBE
Growth of
Al
Ga
As
by
LPE
In
P
Metal Organic Vapor Phase Epitaxy (
MOVPE
)
Acknowledgements.
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