Design of a Linear Ultrasonic Motor With the Bi-Directional Movement

This study presents a design of the linear ultrasonic motor. The major components consist of a slider and a vibrator with a piezoceramic piece. The input signal on the piezoceramic piece causes vibration of the vibrator. The development of the vibrator is based on vibratory analysis of a beam with both ends clamped. The resonant frequencies and the vibratory mode shapes of the vibrator are calculated and compared with those obtained by using the finite element method. By only changing two frequencies of the input signal on the piezoceramic piece, the vibrator is excited and the slider can achieve forward and backward bi-directional movement due to friction between the vibrator and the slider. The calculated results are compared with results obtained by Grant and using software ANSYS.