Search engine for discovering works of Art, research articles, and books related to Art and Culture
Javascript must be enabled to continue!
Novolak design concept for high performance positive photoresists
View through CrossRef
AbstractNovolak resins have been optimized for high performance positive photoresists. Low molecular weight novolak resins are the key components for improving resolution capability, sensitivity, and heat resistance of positive photoresists. Various phenolic compounds (monomers) and oligomers of metacresol novolak resins were evaluated as low molecular weight components. It was found that phenolic compounds that have moderate hydrophobicity and azocoupling capability with diazonaphthaoquinone compounds greatly improve positive photoresist performance. This is explained in terms of the Stone wall model for positive photoresist development.
Title: Novolak design concept for high performance positive photoresists
Description:
AbstractNovolak resins have been optimized for high performance positive photoresists.
Low molecular weight novolak resins are the key components for improving resolution capability, sensitivity, and heat resistance of positive photoresists.
Various phenolic compounds (monomers) and oligomers of metacresol novolak resins were evaluated as low molecular weight components.
It was found that phenolic compounds that have moderate hydrophobicity and azocoupling capability with diazonaphthaoquinone compounds greatly improve positive photoresist performance.
This is explained in terms of the Stone wall model for positive photoresist development.
Related Results
Accurate and efficient evaluation of the ionization potentials of extreme ultraviolet photoresists using density functionals and semi-empirical methods
Accurate and efficient evaluation of the ionization potentials of extreme ultraviolet photoresists using density functionals and semi-empirical methods
AbstractExtreme ultraviolet (EUV) photoresists have become the core materials in lithography with nanometer-sized patterns and are actively explored on the path to realizing smalle...
The Dielectric Properties of Phenolic Resins and Molded Compositions
The Dielectric Properties of Phenolic Resins and Molded Compositions
The dielectric constant and power factor of purified phenol‐formaldehyde Novolak were determined at room temperature over a frequency range of 1,000 cycles to 45,000,000 cycles. Th...
Performative Microforests
Performative Microforests
The design of office buildings can substantially improve the building, social, and ecological performance of office building projects. However, existing research on improving the p...
Recent Advances in Positive Photoresists: Mechanisms and Fabrication
Recent Advances in Positive Photoresists: Mechanisms and Fabrication
Photoresists are fundamental materials in photolithography and are crucial for precise patterning in microelectronic devices, MEMS, and nanostructures. This paper provides an in-de...
Hydatid Disease of The Brain Parenchyma: A Systematic Review
Hydatid Disease of The Brain Parenchyma: A Systematic Review
Abstarct
Introduction
Isolated brain hydatid disease (BHD) is an extremely rare form of echinococcosis. A prompt and timely diagnosis is a crucial step in disease management. This ...
THE ‘PARENT’ IN THE PARENTING STYLE:
A CORRELATIONAL STUDY EXPLORING THE IMPACT OF PARENTING ON SELF-CONCEPT OF THE ADOLESCENT (Preprint)
THE ‘PARENT’ IN THE PARENTING STYLE:
A CORRELATIONAL STUDY EXPLORING THE IMPACT OF PARENTING ON SELF-CONCEPT OF THE ADOLESCENT (Preprint)
BACKGROUND
The present research attempts to explore the dynamics of parent child relationship. The investigation aims at understanding the impact of parenti...
Provocative Tests in Diagnosis of Thoracic Outlet Syndrome: A Narrative Review
Provocative Tests in Diagnosis of Thoracic Outlet Syndrome: A Narrative Review
Abstract
Thoracic outlet syndrome (TOS) is a group of conditions caused by the compression of the neurovascular bundle within the thoracic outlet. It is classified into three main ...