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Epitaxial Growth of Zinc Oxide Whiskers by Chemical-Vapor Deposition under Atmospheric Pressure
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ZnO whiskers were epitaxially grown by a chemical-vapor deposition technique
employed at atmospheric pressure.
Highly oriented ZnO whiskers grew at a substrate temperature of
550°C on (0001)α-Al2O3 substrates
with a growth rate of 3.7 nm/s.
X-ray diffractometry revealed that the epitaxial relationship
between the whiskers and the substrate was determined
as ZnO[1010](0001)//Al2O3[1210](0001)
or ZnO[1210](0001)//Al2O3[1010](0001).
In addition, the full-width at half maximum value of the (0002) reflection was
as low as 0.43°. Images obtained using a scanning electron microscope were analyzed
and it was found that the whisker tip likely has
a radius of curvature of approximately 20 nm.
The typical number density of the whiskers has reached 1.3×105mm-2.
Title: Epitaxial Growth of Zinc Oxide Whiskers by Chemical-Vapor Deposition under Atmospheric Pressure
Description:
ZnO whiskers were epitaxially grown by a chemical-vapor deposition technique
employed at atmospheric pressure.
Highly oriented ZnO whiskers grew at a substrate temperature of
550°C on (0001)α-Al2O3 substrates
with a growth rate of 3.
7 nm/s.
X-ray diffractometry revealed that the epitaxial relationship
between the whiskers and the substrate was determined
as ZnO[1010](0001)//Al2O3[1210](0001)
or ZnO[1210](0001)//Al2O3[1010](0001).
In addition, the full-width at half maximum value of the (0002) reflection was
as low as 0.
43°.
Images obtained using a scanning electron microscope were analyzed
and it was found that the whisker tip likely has
a radius of curvature of approximately 20 nm.
The typical number density of the whiskers has reached 1.
3×105mm-2.
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