Design and Modelling of Novel Linearly Tunable Capacitors

MEMS-based tunable capacitors with electrostatic actuation are well-known for their wide tuning ranges, high Q-factors, fast responses, and small sizes. However, tunable capacitors exhibit very high sensitivity near pull-in voltage which counters the concept of tunability. In this research, two novel designs are presented that improve the high sensitivity in capacitance-voltage (C-V) curve. In the first design, the nonlinear deformation of supporting beams is studied to develop a new nonlinear spring. The variable stiffness coefficients of such springs improve the linearity of the C-V curve, and by delaying the pull-in, the maximum tunability is also increased without using complex geometries. In the second design, an asymmetric non-parallel-plate capacitor is introduced, in which the C-V response has lower sensitivity at high voltages. The design concept can be applied to highly tunable capacitors to improve the sensitivity and maintain high tunability. The numerical results demonstrate low sensitivity and high linearity and tunability for the new designs.