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Spatial Distribution Measurement of Absolute Densities of CF and CF 2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique
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We have developed a measurement method for obtaining spatial
distributions of absolute densities of CF and CF2 radicals in a plasma
reactor by combining single-path infrared laser absorption spectroscopy
(IRLAS) and laser-induced fluorescence (LIF) techniques. This novel method
has been successfully applied to the spatial distribution measurement
of absolute densities of CF and CF2 radicals in an electron cyclotron
resonance (ECR) plasma reactor employing a tetrafluorocarbon gas
(C4F8). It was found that CF radical densities were higher
than CF2 ones in the plasma region but lower outside the plasma region.
Title: Spatial Distribution Measurement of Absolute Densities of CF and CF 2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique
Description:
We have developed a measurement method for obtaining spatial
distributions of absolute densities of CF and CF2 radicals in a plasma
reactor by combining single-path infrared laser absorption spectroscopy
(IRLAS) and laser-induced fluorescence (LIF) techniques.
This novel method
has been successfully applied to the spatial distribution measurement
of absolute densities of CF and CF2 radicals in an electron cyclotron
resonance (ECR) plasma reactor employing a tetrafluorocarbon gas
(C4F8).
It was found that CF radical densities were higher
than CF2 ones in the plasma region but lower outside the plasma region.
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