Plasma polymerization. VI. An ESCA investigation of the RF plasma polymerization of perfluoro‐2‐butyl tetrahydrofuran

AbstractPerfluoro‐2‐butyl tetrahydrofuran was polymerized by an RF glow discharge technique and detailed ESCA studies were made of the resultant films. The rate of film deposition was sensitively dependent on the W/FM parameter and the site of deposition. The ESCA data show that the molecular rearrangement accompanying plasma polymerization and the oxygen functionality is at a significantly lower level than the starting material. Under appropriate conditions plasma polymerization produces material with a C:F stoichiometry of 1:2, although the ESCA data show that the polymer is drastically different from PTFE. ESCA studies are also reported on thin films of the monomer studied at low temperature.