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Silicon Microactuators for Computer Disk Drives
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Silicon micromachining will be an important manufacturing technology for future-generation, high-performance optical and magnetic storage products. In this paper, we shall present recent results related to the design and fabrication of silicon micromachined electromagnetic piggyback microactuators for significantly increasing the track density of magnetic (and potentially optical) rigid disk drives.
Title: Silicon Microactuators for Computer Disk Drives
Description:
Silicon micromachining will be an important manufacturing technology for future-generation, high-performance optical and magnetic storage products.
In this paper, we shall present recent results related to the design and fabrication of silicon micromachined electromagnetic piggyback microactuators for significantly increasing the track density of magnetic (and potentially optical) rigid disk drives.
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