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Single-shot multispectral angle-resolved ellipsometry
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We describe an instantaneous measurement scheme of multispectral angle-resolved ellipsometry with a color camera. A back focal plane image captured by the color camera enables us to simultaneously measure various polarization states along incidence angles and a multispectral domain. Modified parameters based on the principle of micro-ellipsometry are derived for an adequate form in a red, green and blue (RGB) domain by considering the wideband multispectral acquisition. The proposed method is validated by the measurement of uniformly deposited films and comparing our results with a commercial ellipsometer. The comparison shows that our proposed method enables real-time inspection with high precision.
Title: Single-shot multispectral angle-resolved ellipsometry
Description:
We describe an instantaneous measurement scheme of multispectral angle-resolved ellipsometry with a color camera.
A back focal plane image captured by the color camera enables us to simultaneously measure various polarization states along incidence angles and a multispectral domain.
Modified parameters based on the principle of micro-ellipsometry are derived for an adequate form in a red, green and blue (RGB) domain by considering the wideband multispectral acquisition.
The proposed method is validated by the measurement of uniformly deposited films and comparing our results with a commercial ellipsometer.
The comparison shows that our proposed method enables real-time inspection with high precision.
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