Search engine for discovering works of Art, research articles, and books related to Art and Culture
ShareThis
Javascript must be enabled to continue!

Surface-Imaging Lithography

View through CrossRef
Surface-imaging lithography is a technique which was first described by Taylor et al. nearly ten years ago. In this approach, a pattern is defined at the surface or near-surface regions of a resist rather than throughout the entire resist thickness. Surface-imaging can eliminate problems such as reflectivity variations due to different substrates or topography in optical lithography and backscattering in electron-beam lithography.2 The use of surface-imaging has also proven beneficial for deep-UV optical lithography, where the high absorbance of most resists necessitates such an approach.
Title: Surface-Imaging Lithography
Description:
Surface-imaging lithography is a technique which was first described by Taylor et al.
nearly ten years ago.
In this approach, a pattern is defined at the surface or near-surface regions of a resist rather than throughout the entire resist thickness.
Surface-imaging can eliminate problems such as reflectivity variations due to different substrates or topography in optical lithography and backscattering in electron-beam lithography.
2 The use of surface-imaging has also proven beneficial for deep-UV optical lithography, where the high absorbance of most resists necessitates such an approach.

Related Results

Recent advances in applications of multimodal ultrasound-guided photoacoustic imaging technology
Recent advances in applications of multimodal ultrasound-guided photoacoustic imaging technology
AbstractPhotoacoustic imaging (PAI) is often performed simultaneously with ultrasound imaging and can provide functional and cellular information regarding the tissues in the anato...
Integrated Approach To Imaging And Pore Pressure Prediction In The Nile Delta
Integrated Approach To Imaging And Pore Pressure Prediction In The Nile Delta
Abstract The Nile Delta area is well known for its geological and geophysical complexity due to:the presence of gas clouds, chimneys, channels and growth faults i...
In situ assessment of the liver microcirculation in mechanically ventilated rats using sidestream dark-field imaging
In situ assessment of the liver microcirculation in mechanically ventilated rats using sidestream dark-field imaging
Assessment of hepatic microcirculation by on-line visualization has been impossible for a long time. Sidestream dark-field (SDF) imaging is a relatively new method allowing direct ...
Advances in seed phenotyping using X-ray imaging
Advances in seed phenotyping using X-ray imaging
In this chapter, we propose a panel of the imaging techniques dedicated to seed phenotyping. While review articles exist for most of these imaging techniques, X-Ray imaging, which ...
Robust Surface Reconstruction of Plant Leaves from 3D Point Clouds
Robust Surface Reconstruction of Plant Leaves from 3D Point Clouds
The automation of plant phenotyping using 3D imaging techniques is indispensable. However, conventional methods for reconstructing the leaf surface from 3D point clouds have a trad...
In situ assessment of the brain microcirculation in mechanically-ventilated rabbits using sidestream dark-field (SDF) imaging
In situ assessment of the brain microcirculation in mechanically-ventilated rabbits using sidestream dark-field (SDF) imaging
A ssessment of the cerebral microcirculation by on-line visualization has been impossible for a long time. Sidestream dark-field (SDF) imaging is a relatively new method allowing d...
Orthogonal polarization spectral imaging
Orthogonal polarization spectral imaging
The microcirculation plays a crucial role in the interaction between blood and tissues both in physiological and pathophysiological states. Despite its critical role in numer ous d...

Recent Results

Landscape sociology as developing academic discipline
Landscape sociology as developing academic discipline
The common tendency in higher education is specialisation. Landscape has been subject of interest in sociology from its beginnings, and social aspects are one of mane characteristi...
Shame and vicarious shame in the news: A case study of the Sewol ferry disaster
Shame and vicarious shame in the news: A case study of the Sewol ferry disaster
This study examines how shame, a psychological mechanism suppressing the violation of social norms, is reflected in the news. The results of a content analysis of the South Korean ...
Introduction to the Tafel v-bis Dataset: Death Duty Summary Information for The Netherlands, 1921
Introduction to the Tafel v-bis Dataset: Death Duty Summary Information for The Netherlands, 1921
Abstract This article introduces a newly constructed dataset (i.e. the Tafel v-bis Dataset) containing summary information for all Dutch citizens who died in 1921 and were subject ...

Back to Top