Search engine for discovering works of Art, research articles, and books related to Art and Culture
Javascript must be enabled to continue!
Surface-Imaging Lithography
View through CrossRef
Surface-imaging lithography is a technique which was first described by Taylor et al. nearly ten years ago. In this approach, a pattern is defined at the surface or near-surface regions of a resist rather than throughout the entire resist thickness. Surface-imaging can eliminate problems such as reflectivity variations due to different substrates or topography in optical lithography and backscattering in electron-beam lithography.2 The use of surface-imaging has also proven beneficial for deep-UV optical lithography, where the high absorbance of most resists necessitates such an approach.
Title: Surface-Imaging Lithography
Description:
Surface-imaging lithography is a technique which was first described by Taylor et al.
nearly ten years ago.
In this approach, a pattern is defined at the surface or near-surface regions of a resist rather than throughout the entire resist thickness.
Surface-imaging can eliminate problems such as reflectivity variations due to different substrates or topography in optical lithography and backscattering in electron-beam lithography.
2 The use of surface-imaging has also proven beneficial for deep-UV optical lithography, where the high absorbance of most resists necessitates such an approach.
Related Results
Recent advances in applications of multimodal ultrasound-guided photoacoustic imaging technology
Recent advances in applications of multimodal ultrasound-guided photoacoustic imaging technology
AbstractPhotoacoustic imaging (PAI) is often performed simultaneously with ultrasound imaging and can provide functional and cellular information regarding the tissues in the anato...
In situ assessment of the liver microcirculation in mechanically ventilated rats using sidestream dark-field imaging
In situ assessment of the liver microcirculation in mechanically ventilated rats using sidestream dark-field imaging
Assessment of hepatic microcirculation by on-line visualization has been impossible for a long time. Sidestream dark-field (SDF) imaging is a relatively new method allowing direct ...
Robust Surface Reconstruction of Plant Leaves from 3D Point Clouds
Robust Surface Reconstruction of Plant Leaves from 3D Point Clouds
The automation of plant phenotyping using 3D imaging techniques is indispensable. However, conventional methods for reconstructing the leaf surface from 3D point clouds have a trad...
In situ assessment of the brain microcirculation in mechanically-ventilated rabbits using sidestream dark-field (SDF) imaging
In situ assessment of the brain microcirculation in mechanically-ventilated rabbits using sidestream dark-field (SDF) imaging
A ssessment of the cerebral microcirculation by on-line visualization has been impossible for a long time. Sidestream dark-field (SDF) imaging is a relatively new method allowing d...
Non-invasive imaging and spectroscopy techniques for identifying historical pigments: a case study of Iranian manuscripts from the Qajar era
Non-invasive imaging and spectroscopy techniques for identifying historical pigments: a case study of Iranian manuscripts from the Qajar era
AbstractIn recent years, the expansion of non-invasive methods has been a trend in identifying historical pigments. Accordingly, this study aimed to identify the pigments used in t...
Orthogonal polarization spectral imaging
Orthogonal polarization spectral imaging
The microcirculation plays a crucial role in the interaction between blood and tissues both in physiological and pathophysiological states. Despite its critical role in numer ous d...
VLF mapping and resistivity imaging of contaminated quaternary formations near to "Panewniki" coal waste disposal (Southern Poland)
VLF mapping and resistivity imaging of contaminated quaternary formations near to "Panewniki" coal waste disposal (Southern Poland)
The purpose of this work was to detect groundwater pollution and to identify the conditions of soil and groundwater near the coal waste disposal "Panewniki" Halemba-Wirek Coal Mine...
Manganese Accumulation in Rock Varnish on a Desert Piedmont, Mojave Desert, California, and Application to Evaluating Varnish Development
Manganese Accumulation in Rock Varnish on a Desert Piedmont, Mojave Desert, California, and Application to Evaluating Varnish Development
AbstractRock varnish coatings tend to become thicker, darker, and more continuous over time, leading to the use of changes in overall varnish color and the percentage of clast surf...