Analysis of ARROW Waveguide based Microcantilever for Sensing Application

Abstract Analysis of microcantilever beam and ARROW microcantilever waveguides are presented in this work. The microcantilever is simulated by using the silicon nitride material. Electric voltage applied creates the deformation in the cantilever beam. The deformation leads to displacement of the beam. The displacement is due to bending of the cantilever tip. The integration of MEMS cantilever and ARROW waveguide results in the ARROW microcantilever waveguide. The ARROW microcantilever waveguide quality factor, electric filed intensity and sensitivity analysis are the three important parameters presented. The quality factor is obtained by varying the air gap distance between cantilever waveguide and output waveguide. Through this simulation using FDTD sensitivity up to 73.78 nm/RIU has been achieved for the microcantilever arrow waveguide.