Search engine for discovering works of Art, research articles, and books related to Art and Culture
Javascript must be enabled to continue!
Photoluminescence Analysis of {311} Interstitial Defects in Wafers Synthesized by Separation by Implanted Oxygen
View through CrossRef
The interstitial-type {311} planar defects introduced in wafers synthesized by separation by implanted oxygen (SIMOX) have been investigated by photoluminescence (PL) spectroscopy and transmission electron microscopy (TEM). Deep-level PL of low-dose SIMOX wafers with doses of 2, 4, and 6×1017 cm-2 were analyzed under various excitations
with different penetration depths. In as-implanted wafers, the 0.903 eV line associated with the {311} defects appeared in the region below the oxygen implanted layer. Correspondingly, TEM observation revealed rod-like defects due to the {311} defects in the same region. After annealing, the 0.903 eV line disappeared and dislocation-related lines became visible. These results indicate that the {311} defects are generated below the implanted layer and are extended to dislocations after annealing.
Title: Photoluminescence Analysis of {311} Interstitial Defects in Wafers Synthesized by Separation by Implanted Oxygen
Description:
The interstitial-type {311} planar defects introduced in wafers synthesized by separation by implanted oxygen (SIMOX) have been investigated by photoluminescence (PL) spectroscopy and transmission electron microscopy (TEM).
Deep-level PL of low-dose SIMOX wafers with doses of 2, 4, and 6×1017 cm-2 were analyzed under various excitations
with different penetration depths.
In as-implanted wafers, the 0.
903 eV line associated with the {311} defects appeared in the region below the oxygen implanted layer.
Correspondingly, TEM observation revealed rod-like defects due to the {311} defects in the same region.
After annealing, the 0.
903 eV line disappeared and dislocation-related lines became visible.
These results indicate that the {311} defects are generated below the implanted layer and are extended to dislocations after annealing.
Related Results
High Concentration Oxygen and Hypercapnia in Respiratory Disease
High Concentration Oxygen and Hypercapnia in Respiratory Disease
<p>Oxygen-induced elevations in arterial carbon dioxide tension have been demonstrated in patients with chronic obstructive pulmonary disease (COPD), asthma, pneumonia, obesi...
Studies of Boron Segregation to {311} Defects in Silicon-Implanted Silicon
Studies of Boron Segregation to {311} Defects in Silicon-Implanted Silicon
Czochralski Si wafers with a boron concentration of 2.7×1017 cm-3 were implanted with 50 keV or 150 keV Si+ with doses from 5×1012 cm-2 to 5×1015 cm-2, followed by annealing at 670...
Closed-Loop Oxygen Control
Closed-Loop Oxygen Control
<p>Guidelines recommend that oxygen should be titrated to achieve a target oxygen saturation (SpO2 ) range in acutely unwell patients, a concept colloquially known as “swimmi...
Baseline Particle Reduction of Downstream Oxide Etchers Etching Contacts and Vias
Baseline Particle Reduction of Downstream Oxide Etchers Etching Contacts and Vias
AbstractIn the process of etching contact and via openings with a downstream oxide etcher, plasma etch byproducts form polymer that collects on process chamber components. Polymer ...
Defect Analysis in Bonded and H + Split Silicon-on-Insulator Wafers by Photoluminescence Spectroscopy and Transmission Electron Microscopy
Defect Analysis in Bonded and H + Split Silicon-on-Insulator Wafers by Photoluminescence Spectroscopy and Transmission Electron Microscopy
Defects in silicon-on-insulator wafers fabricated by bonding and H+
splitting technique
(Unibond wafers [Unibond is a registered trademark of SOITEC.]) were characterized b...
INTERSTITIAL GLAND TISSUE OF MAMMALIAN OVARY
INTERSTITIAL GLAND TISSUE OF MAMMALIAN OVARY
ABSTRACT
The interstitial gland cells of the mammalian ovary originate from the theca interna and surrounding stromal elements of degenerating follicles and are simultaneou...
Influence of Human Chorionic Gonadotropin on Maturation in Striped Murrel, Channa striatus
Influence of Human Chorionic Gonadotropin on Maturation in Striped Murrel, Channa striatus
Gonadal development, gonadosomatic index (GSI), oocyte diameter, fecundity, histology and level of serum steroid hormones (testosterone and estradiol-17β) were observed in captive ...
The impact of saw mark direction on the fracture strength of thin (120 µm) monocrystalline silicon wafers for photovoltaic cells
The impact of saw mark direction on the fracture strength of thin (120 µm) monocrystalline silicon wafers for photovoltaic cells
Abstract
Using a multi-diamond-wire saw, we cut monocrystalline silicon bricks into thin (120 µm) wafers, on which we observed saw marks and elongated pits with s...