Search engine for discovering works of Art, research articles, and books related to Art and Culture
Javascript must be enabled to continue!
MEMS Humidity Sensors
View through CrossRef
This chapter reviews MEMS humidity sensors fabricated using microfabrication technologies. It discusses the operation principle, different designs, and the fabrication technologies for the different sensing mechanisms. Sensing humidity using capacitive sensors is first reviewed with a highlight on the different sensing materials and how their permittivity and physical parameters affect the sensor performance. Then the chapter discusses the piezoelectric humidity sensing method, wherein piezoelectric sensors the dynamic mode measurement is used. In these sensors, the mass changes corresponding to the humidity, resulting in resonance frequency shift and amplitude change. Finally, the chapter reviews the resistive humidity sensors where the change in the resistivity of various materials is used as an indication of humidity change in the environment.
Title: MEMS Humidity Sensors
Description:
This chapter reviews MEMS humidity sensors fabricated using microfabrication technologies.
It discusses the operation principle, different designs, and the fabrication technologies for the different sensing mechanisms.
Sensing humidity using capacitive sensors is first reviewed with a highlight on the different sensing materials and how their permittivity and physical parameters affect the sensor performance.
Then the chapter discusses the piezoelectric humidity sensing method, wherein piezoelectric sensors the dynamic mode measurement is used.
In these sensors, the mass changes corresponding to the humidity, resulting in resonance frequency shift and amplitude change.
Finally, the chapter reviews the resistive humidity sensors where the change in the resistivity of various materials is used as an indication of humidity change in the environment.
Related Results
(Invited) A 1-mG MEMS Sensor
(Invited) A 1-mG MEMS Sensor
MEMS (microelectromechanical systems) technology has contributed substantially to the miniaturization of inertial sensors, such as accelerometers and gyroscopes [1]. Nowadays, MEMS...
RELIABILITY OF MEMS ACCELEROMETERS FOR INSTRUMENTAL INTENSITY MAPPING OF EARTHQUAKES
RELIABILITY OF MEMS ACCELEROMETERS FOR INSTRUMENTAL INTENSITY MAPPING OF EARTHQUAKES
This work investigates suitability of low cost Micro-Electro Mechanical System (MEMS) sensors in strong motion related studies, particularly in shaking intensity networks. Two type...
A MEMS IMU De-Noising Method Using Long Short Term Memory Recurrent Neural Networks (LSTM-RNN)
A MEMS IMU De-Noising Method Using Long Short Term Memory Recurrent Neural Networks (LSTM-RNN)
Microelectromechanical Systems (MEMS) Inertial Measurement Unit (IMU) containing a three-orthogonal gyroscope and three-orthogonal accelerometer has been widely utilized in positio...
Development of a multimodal imaging system based on LIDAR
Development of a multimodal imaging system based on LIDAR
(English) Perception of the environment is an essential requirement for the fields of autonomous vehicles and robotics, that claim for high amounts of data to make reliable decisio...
MEMS-based reconfigurable endoluminal MRI coils
MEMS-based reconfigurable endoluminal MRI coils
Capteurs IRM endoluminaux reconfigurables fondés sur des micro-commutateurs MEMS
Le cancer colorectal est le troisième cancer le plus mortel. Avec un diagnostic pré...
3D Printed MEMS Technology—Recent Developments and Applications
3D Printed MEMS Technology—Recent Developments and Applications
Microelectromechanical systems (MEMS) are of high interest for recent electronic applications. Their applications range from medicine to measurement technology, from microfluidics ...
Humidity Sensors, Major Types and Applications
Humidity Sensors, Major Types and Applications
The need for humidity sensors in various fields have led to the development and fabrication of sensors for use in industries such as the medical, textile, and laboratories. This ch...
Humidity Sensors Printed on Recycled Paper and Cardboard
Humidity Sensors Printed on Recycled Paper and Cardboard
Research, design, fabrication and results of various screen printed capacitive humidity sensors is presented in this paper. Two types of capacitive humidity sensors have been desig...