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Colliding laser-produced plasmas as targets for laser-generated extreme ultraviolet sources
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Colliding plasmas produced by neodymium-doped yttrium aluminium garnet (Nd:YAG) laser illumination of tin wedge targets form stagnation layers, the physical parameters of which can be controlled to optimise coupling with a carbon dioxide (CO2) heating laser pulse and subsequent extreme ultraviolet (EUV) production. The conversion efficiency (CE) of total laser energy into EUV emission at 13.5 nm ± 1% was 3.6%. Neglecting both the energy required to form the stagnation layer and the EUV light produced before the CO2 laser pulse is incident results in a CE of 5.1% of the CO2 laser energy into EUV light.
AIP Publishing
Title: Colliding laser-produced plasmas as targets for laser-generated extreme ultraviolet sources
Description:
Colliding plasmas produced by neodymium-doped yttrium aluminium garnet (Nd:YAG) laser illumination of tin wedge targets form stagnation layers, the physical parameters of which can be controlled to optimise coupling with a carbon dioxide (CO2) heating laser pulse and subsequent extreme ultraviolet (EUV) production.
The conversion efficiency (CE) of total laser energy into EUV emission at 13.
5 nm ± 1% was 3.
6%.
Neglecting both the energy required to form the stagnation layer and the EUV light produced before the CO2 laser pulse is incident results in a CE of 5.
1% of the CO2 laser energy into EUV light.
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