Search engine for discovering works of Art, research articles, and books related to Art and Culture
Javascript must be enabled to continue!
Influence of polar distribution on piezoelectric response of aluminum nitride thin films
View through CrossRef
The authors have investigated the influence of the crystal orientation and the polar distribution on the piezoelectric response of aluminum nitride (AlN) thin films prepared on Si, Mo∕Si, and Mo∕AlN-interlayer (IL)/Si substrates with increasing sputtering power. The crystal orientation of films prepared on Si improves with increasing sputtering power. On the other hand, the crystal orientation of films prepared on Mo∕Si and Mo∕AlN-IL∕Si hardly changes. However, the piezoelectric response of all the films drastically changes from negative to positive values and the predominant polarity changes from N polarity to Al polarity. We found the proportional relationship between the polar distribution and piezoelectric response.
Title: Influence of polar distribution on piezoelectric response of aluminum nitride thin films
Description:
The authors have investigated the influence of the crystal orientation and the polar distribution on the piezoelectric response of aluminum nitride (AlN) thin films prepared on Si, Mo∕Si, and Mo∕AlN-interlayer (IL)/Si substrates with increasing sputtering power.
The crystal orientation of films prepared on Si improves with increasing sputtering power.
On the other hand, the crystal orientation of films prepared on Mo∕Si and Mo∕AlN-IL∕Si hardly changes.
However, the piezoelectric response of all the films drastically changes from negative to positive values and the predominant polarity changes from N polarity to Al polarity.
We found the proportional relationship between the polar distribution and piezoelectric response.
Related Results
Alternative Entrances: Phillip Noyce and Sydney’s Counterculture
Alternative Entrances: Phillip Noyce and Sydney’s Counterculture
Phillip Noyce is one of Australia’s most prominent film makers—a successful feature film director with both iconic Australian narratives and many a Hollywood blockbuster under his ...
Review of high temperature piezoelectric materials, devices, and applications
Review of high temperature piezoelectric materials, devices, and applications
Piezoelectric functional materials have been extensively studied and employed in numerous devices. With the rapid development of modern industries, such as power plants, aerospace,...
Development of Aluminum Nitride/Platinum Stack Structures for an Enhanced Piezoelectric Response
Development of Aluminum Nitride/Platinum Stack Structures for an Enhanced Piezoelectric Response
ABSTRACTAluminum nitride (AlN) films are being investigated for piezoelectric and high temperature applications, but the piezoelectric response is still much lower than that of mor...
Design, fabrication, and properties of 2-2 connectivity cement/polymer based piezoelectric composites with varied piezoelectric phase distribution
Design, fabrication, and properties of 2-2 connectivity cement/polymer based piezoelectric composites with varied piezoelectric phase distribution
The laminated 2-2 connectivity cement/polymer based piezoelectric composites with varied piezoelectric phase distribution were fabricated by employing Lead Zirconium Titanate ceram...
Spray Coated Nanocellulose Films Productions, Characterization and Application
Spray Coated Nanocellulose Films Productions, Characterization and Application
Nanocellulose (NC) is a biodegradable, renewable and sustainable material. It has strong potential to use as a functional material in various applications such as barriers, coating...
Graphene–aluminum nitride NEMS resonant infrared detector
Graphene–aluminum nitride NEMS resonant infrared detector
AbstractThe use of micro-/nanoelectromechanical resonators for the room temperature detection of electromagnetic radiation at infrared frequencies has recently been investigated, s...
Ceramic Coatings for Aluminum Engine Blocks
Ceramic Coatings for Aluminum Engine Blocks
<div class="htmlview paragraph">The trend toward lighter vehicles for improved performance has recently introduced the use of aluminum and plastic materials for vehicle bodie...