Design simulation and process realization of a flexible MEMS vector hydrophone

Purpose This study aims to design a small-size conformable flexible micro-electro-mechanical system (MEMS) vector hydrophone to meet the miniaturization requirements of unmanned underwater vehicle. Design/methodology/approach The cilia receive the acoustic signal to oscillate to cause changes in the stress on the beam, which in turn causes changes in the piezoresistive resistance on the beam, and changes in the resistance cause changes in the output voltage. Findings The results show that the flexible hydrophone in the paper has a sensitivity of −182 dB@1 kHz (re 1V/µPa) at 1 Pa sound pressure, can detect low-frequency hydroacoustic signals from 20 to 550 Hz and has good spatial directivity, and the flexible substrate permits the hydrophone to realize bending deformation, which can be well attached to the surface of the object. Originality/value In this study, a finite element simulation model of the hydrophone microstructure is constructed and its performance is verified by simulation. The success rate of the proposed MEMS transfer process is as high as 94%, and the prepared piezoresistors exhibit excellent resistance characteristics and high consistency. These results provide innovative ideas to enhance the performance and stability and achieve miniaturization of hydrophones.