Surface Tension-Based Ultra-Micro Precision Dispensing Method For Micro-Scale Manufacturing

Abstract Due to the rapid development of precision micro-manufacturing technology, it has made higher requirements for micro-connection and micro-assembly technologies. An ultra-micro-dispensing method based on the surface tension of the droplets is proposed, which can be realized on the surface of micro-components. Distribute the glue between pl. Use a pipette to pass through the capillary containing the glue, cover the tip of the pipette with glue, and then form tiny glue droplets under the action of the glue's own adhesive force and surface tension. In the experiment, the factors such as the diameter of the pipette, the speed of movement, the Cap value, and the viscosity of the glue were analyzed in detail.Fly upgrade ultra-small dispensing was achieved.The minimum glue droplet was 22.4 μm, and the droplet volume was 228 fL. The planning of the glue droplet trajectory, different plane graphics composed of uniform fl glue droplets, this method achieves precise control of the size and position accuracy of the glue droplets, the deviation of the glue spot diameter is within 2.2 μm, and the deviation of the glue droplet position is 1.58 μm Inside.