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Method for Plasma Damage Assessment of Optics
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A novel measurement setup based on Digital Holography Microscopy in reflection and Total internal reflection mode is developed for quantitative assessment of plasma damage of fused silica optics
Optica Publishing Group
Title: Method for Plasma Damage Assessment of Optics
Description:
A novel measurement setup based on Digital Holography Microscopy in reflection and Total internal reflection mode is developed for quantitative assessment of plasma damage of fused silica optics.
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