The development of laser microprocessing in China

In 1995 the National Center of Laser Technology (NCLT) of China was opened. From that time there has been research on laser microfabrication at NCLT. Under the support of the National Science Foundation and Beijing Science Foundation several projects involving laser micro processing have been carried out. NCLT has make great progress in the field of laser micro processing with excimer laser and powder microsintering using YAG laser. Based on the principle of excimer laser micromachining, a micromachining system, including a beam delivery system, mask illumination system based on fly’s eye homogenizer, double telecentric optical and electrical system, has been developed. The application of micromachining technology to the fabrication of MEMS has been conducted and 50∼500µm diameter micro-gears have been made using polymers and ceramics. Meanwhile the excimer laser has been to manufacture microfluid biochip. Besides this the microfabrication using laser sintering powder material has been investigated at NCLT. This represents the one aspect of the development of laser microprocessing in China.