Quantum Size Effect of Semiconductor Microcrystallites Doped in SiO2-Glass Thin Films Prepared by Rf-Sputtering

Semiconductors such as CdTe, CdSe and GaAs, microcrystallites could be successfully doped into SiO2-glass films by the magnetron rf-sputtering technique. The average size of the microcrystallites depended on sputtering conditions, and postannealing was not necessary to form microcrystallites in the silica-glass films. The average diameter varied from below 15 A to 62 A. In the optical absorption spectra, the absorption edge of the films clearly exhibited blue shift compared to each bulk semiconductor, and thus the quantum size effect could be found in these microcrystallites.