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Design of Double Nozzle Type Powder Jet Device Optimized for PJD
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Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation,
piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) method
has been proposed. In the PJD process, microparticles are sprayed out from nozzle under the
conditions of room temperature and atmospheric pressure, and make a film on the substrate. We have
developed a new jet mechanism of double-nozzle type, and reported its results previously [1]. In this
study, we optimized the shape of the nozzle through investigating the influence of different
dimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found that
nozzle diameter has a large affect on particles velocity.
Trans Tech Publications, Ltd.
Title: Design of Double Nozzle Type Powder Jet Device Optimized for PJD
Description:
Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation,
piezoelectric and ferroelectric materials.
To form the thick film, powder jet deposition (PJD) method
has been proposed.
In the PJD process, microparticles are sprayed out from nozzle under the
conditions of room temperature and atmospheric pressure, and make a film on the substrate.
We have
developed a new jet mechanism of double-nozzle type, and reported its results previously [1].
In this
study, we optimized the shape of the nozzle through investigating the influence of different
dimensions and shape of the nozzle on the particles blasting velocity.
As a result, it is found that
nozzle diameter has a large affect on particles velocity.
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