Research on Lapping Technology for Beryllium Rotor of ESG

Abstract In this paper, the process parameters such as the diameter of the cups, the rotation speed of the cups, and the lapping pressure are optimized through the simulation analysis of the lapping process parameters in the four cup lapping action and the analysis of the statics of the beryllium rotor. A four cup lapping platform for a beryllium rotor was built, and the four-axis motion control was realized through a programming method based on LabVIEW. Cups with three surface materials were developed by using vapor deposition and other methods, and lapping experiment were conducted for cups with different materials and granularity. Finally, a beryllium rotor with a surface roughness of 80nm was obtained through the design and processing of the process route, and an ultra-precision lapping process for the ESG beryllium rotor was obtained.